10716A High-Resolution Interferometer

Product Status:	Currently Orderable \| Currently Supported

Description

The Agilent 10716A High Resolution Interferometer is used for single and multiple axis applications such as precision X-Y stages. The 10716A offers twice the resolution of conventional plane mirror interferometers and has the same excellent thermal stability as the 10706B High Stability Plane Mirror Interferometer. Measurement drift is typically ½ of that exhibited by a conventional plane mirror interferometer. These features result in improved accuracy, repeatability, and thermal stability. However, slew rate is halved.

The 10716A includes one 10723A High Stability Adapter (which consists of a high reflector and a quarter wave plate) for the reference, two retroreflectors for manipulating the beam path, one beam bender, and one quarter wave plate. The user must provide the measurement mirror, such as the 10724A Plane Mirror Reflector.

The 10716A Option 001 is available for optical layouts that require the interferometer to turn the beam.

Brief description: Interferometer, plane mirror, linear, high resolution, 1 axis, 6 mm beam
Measurements: Linear
Number of axis: 1
Beam size: 6 mm
Usage: Plane mirror, high resolution
Application: Single axis
Stability: Medium
Optical resolution: Lambda/8 (79.1 nm, 3.1 uin)
System resolution (32x): Lambda/256 (2.5 nm, 0.1 uin) (When used with the Agilent 5527B Laser Positioning System, 10885A PC Axis Board or 10895A Laser Axis Board for VMEbus.)
System resolution (256x): Lambda/2048 (0.31 nm, 0.012 uin) (When used with the Agilent 10897B, 10897C and 10898A Axis Boards for VMEbus.)
Beam separation: 12.7 mm (0.5 in)
Weight: 502 g (1.11 lb)
Type: Plane mirror
Recommended reflector: 10724A or user supplied
Mount used: 10711A
Beam bending possible: Yes. Requires Option 001
Interferometer movement allowed: Yes
Related products: 10706A, 10706B, 10711A, 10724A