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MEMS/NEMS Device Measurement Solution

MEMS device sm

Accelerate Your Research, Development, and Manufacturing Efficiency

MEMS (Micro Electro Mechanical Systems) is the technology to build very small devices, whose range is generally from a millimeter to a micrometer. NEMS (Nano Electro Mechanical Systems) is similar but its range is a nanometer. MEMS/NEMS device is the integrated device, on which movable parts, sensor, actuator, and electronic circuit are built by MEMS/NEMS technology.

Agilent Technologies offers several instruments to help the R&D activity of the MEMS/NEMS device.

Agilent can help you to establish more accurate device modeling, more efficient failure analysis, and better process by the solutions below.

Measurements, Example Devices & Solutions

Displacement→Electric Signal Transducer Technology (Sensor)
  Electrostatic Piezoelectric Magneto-impedance
Pressure Sensor   X   X -
Accelerometer   X   X   X
Gyroscope   X   X -
Flow Sensor -   X -
Magnetometer - -   X
Electric Signal→Displacement Transducer Technology (Actuator)
  Electrostatic Electromagnetic Piezoelectric Other Information
Optical Switch   X   X -   Optical Evaluation
Optical Scanner   X   X   X   Optical Evaluation

Documents & Downloads

Accelerate Your MEMS Device Development and Manufacturing Efficiency 
This brochure describes a general overview of Agilent's capabilities in MEMS device testing and generates awareness of Agilent impedance MEMS test solution to customer.

Brochure 2007-11-12

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Accurate Evaluation of MEMS Piezoelectric Sensor and Actuator using the 4294A 
This application brief describes the benefits of using the Agilent 4294A for device characterization of MEMS piezoelectric sensors and actuators, along with its wide variety of analysis functions and features and how it improves design efficiency.

Application Note 2007-04-06

Characterizing MEMS Magneto-Impedance Sensor using the Agilent Impedance Analyzer 
This application brief describes the benefits of using Agilent impedance analyzers for device characterization of MEMS Magneto-Impedance (MI) sensors.

Application Note 2007-03-31

Improving the Test Efficiency of the MEMS Capacitive Sensor using the E4980A 
This application brief describes the features of the Agilent E4980A and how it can dramatically improve the test efficiency of MEMS capacitive sensors.

Application Note 2007-04-13

Characterizing Electromagnetic MEMS Optical Switch Actuator using the E4980A 
This application brief describes how the Agilent E4980A improves the test efficiency of electromagnetic MEMS optical switch actuators.

Application Note 2007-04-04

Characterizing Electromagnetic MEMS Optical Scanner using the E4980A 
This application brief describes how the Agilent E4980A can greatly improve the test efficiency of electromagnetic MEMS optical scanners.

Application Note 2007-04-04

Improving Test Efficiency of MEMS Electrostatic Actuator using the E4980A 
This application brief describes how the Agilent E4980A can greatly improve the test efficiency of MEMS electrostatic actuators.

Application Note 2007-04-12

MEMS On-wafer Evaluation in Mass Production 
This application note describes how to evaluate MEMS elements in the on-wafer stage in order to lower the total production cost in mass production.

Application Note 2008-11-12