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Does N5181B or N5182B MXG Option UNY/UNX have backward code compatibility with E8663D or 8663D signal generators?

Yes, the N5181B and N5182B MXG Option UNY/UNX has the same SCPI as PSG E8663D. E8663D is the replacement of 8663D with BWCC (backward code compatibility).