B1500A Semiconductor Device Analyzer

Summary

The Agilent B1500A Semiconductor Device Analyzer is a modular instrument with a ten-slot configuration that supports both IV and CV measurements and also fast high-voltage pulsing. Its familiar, Microsoft ® Windows ® user interface supports Agilent’s EasyEXPERT software, which provides a new, more intuitive task-oriented approach to device characterization. Because of its extremely low-current, low-voltage, and integrated capacitance measurement capabilities, the Agilent B1500A can be used for a wide range of semiconductor device characterization needs (IC-CAP supports the B1500A). It is also an excellent solution for non-volatile memory cell characterization and high-speed device characterization (including advanced NBTI and RTS noise (RTN) measurement).

There are currently 7 types of modules available for the B1500A. See the module selection table at the bottom of this page.

Application Topics

New application note and sample programs on Solar Cells characterization are now available. Please visit our "Precision SMU Products for Solar Cell Evaluation" page.

Module Information

• The B1525A (HV-SPGU: High Voltage – Semiconductor Pulse Generator Unit) module can improve the throughput o flash memory device testing. Online demo videos are available in the B1525A demo webpage.
• The B1530A (WGFMU: Waveform Generator and Fast Measurement Unit) module helps you make critical pulse measurements you couldn't done before. For more information please visit B1530A product page.
• The B1500A provides a variety of pulse solutions. Our new selection guide helps you understand which solution is best for your application. For more information please visit Agilent Pulsed IV parametric test solution page.

Related Links

• The EasyEXPERT and Desktop EasyEXPERT help you not only improve your measurement efficiency, but also provide easy-to-use test environment. For more information please visit EasyEXPERT Page.
• Agilent Low-leakage Switch Matrix Family provides flexibility to create an automated measurement solution without compromising measurement performance. For more information please visit Switch Matrix Family page.
• Agilent Modular SMU Series enable customization and future expansion as requirements change. In addition, the new 4.0 version of Desktop EasyEXPERT can control these instruments. For more information please visit Modular SMU Series page.

Features and Benefits

• Superior IV measurement performance: 0.1 fA / 0.5 µV measurement resolution
• Measurement features include single and multi-channel sweep, time sampling, list sweep, quasi-static CV (using the SMUs), direct control and arbitrary linear waveform generation (ALWG) GUI for the HV-SPGUs.
• Optional, integrated capacitance module supports CV measurements up to 5 MHz
• Optional positioner-based CV-IV switching solutions available with 0.5 µV voltage measurement resolution and 10 fA, 1 fA or 0.1 fA current measurement resolution capability
• Easy test automation with built-in semiautomatic wafer prober drivers and test sequencing without programming via the Quick Test mode
• Optional high-voltage semiconductor pulse generator unit (HV-SPGU) available with 10 ns programmable pulse widths and +/- 40 V (80 V peak-to-peak) output.
• Optional waveform generator/fast measurement unit (WGFMU) available with ALWG and fast current or voltage measurement capabilities.
• 10 ns pulsed IV solution is available for characterizing high-k gate dielectric and SOI (silicon-on-insulator) transistors.
• A Classic Test mode is available to provide the look, feel, and terminology of the 4155/4156 interface while enhancing user interaction by taking full advantage of Microsoft ® Windows ® GUI features

Module Selection Guide

Module	Required Slot	Main Specification
B1510A HPSMU	2	Up to 200V, 1A force. 10fA current resolution
B1511A MPSMU	1	Up to 100V, 100mA force, 10fA current resolution
B1517A HRSMU	1	Up to 100V, 100mA force, 1fA current resolution
E5288A ASU	NA	Up to 100V, 100mA force, 100aA current resolution
B1520A MFCMU	1	1kHz to 5MHz, up to 100V DC bias with SMU
B1525A HV-SPGU	1	Min 12.5ns pulse width, 10ns transition time, up to 40V with 3 level pulse
B1530A WGFMU	1	Min 100ns pulse width, 10V peak-to-peak output, 5ns current or voltage measurement sampling speed

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