N9201A Array Structure Parametric Test System

General Features

• Option for 4070 Series of parametric testers
• Multi-channel SMU measurement capability
• One pass platform on 4070 Series
• Concurrent TEG test/measurement

Measurement Capabilities

• Up to 40 SMU channels
• 5 picoamp and 100 microvolt measurement resolution
• Address signal generation
• SMU embedded program memory for concurrent measurement

Application for BEOL/Yield Ramp Up

• Good for BEOL TEG testing (Resistor,Vth,etc.)
• Concurrent measurement resource for High/Low resolution TEG part
• Improve existing 4070´s throughput drastically for BEOL TEG testing

Addressable Array Test Structure Test Capability

• Address Generation Function on Parametric Tester
• SPC (Statistical Process Control) for DFM
• Up to 32 bit parallel address signal generation
• Up to 8 V/125 mA/50 kbps address signal generation

• 產品型錄
  2008-08-12 | PDF 145 KB

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供應 電洽