4080 Series of Parametric Test Systems

Summary

Existing and new wafer fabs face ever-greater parametric testing challenges. Out of necessity, parametric test has expanded beyond pure DC measurement and now spans a variety of different measurement types, including parallel test, Flash cell write/erase testing, and RF S-parameter characterization. Anticipating these needs, Agilent has developed the versatile and flexible 4080 parametric test platform.

• Advanced test platform boosts performance with ultra-fast CPU
  The newly-designed 4080 platform incorporates a more powerful CPU and other architecture improvements that can boost the throughput of transferred 4070 plans by 10 to 20 percent without any program modifications. This reduces test times and saves you money.
• Virtual Multiple Testhead Technology offers dramatic throughput improvements
  All 4080 Series testers running SPECS support both synchronous and asynchronous parallel test using Agilent’s Virtual Multiple Testhead Technology. Using this technique in conjunction with the appropriate test element group (TEG) design, it is possible to get throughput improvements of up to 50% over conventional serial techniques.
• Flexible configuration minimizes costs
  4080 Series testers are available in two versions: standard low-current and ultra-low current, allowing you to select the most cost-effective configuration for each 4080 Series tester that you purchase.
• High-speed capacitance measurement reduces test times
  4080 Series testers all support an optional high-speed capacitance measurement unit (HS-CMU) that is integrated into the test head electronics.
• HV-SPGU supports testing of next-generation Flash memory cell processes
  The 4082F and 4083A both support a Semiconductor Pulse Generator Unit (SPGU) mainframe and high-voltage SPGU (HV-SPGU) modules that permit testing of advanced Flash memory cell technologies.
• RF S-parameter measurement and optional RF matrix permit efficient testing of RF structures in production
  The 4083A supports an Agilent PNA for 20 GHz S-parameter measurements. In addition, an 8x10 RF matrix option with 20 GHz bandwidth is also available to enable the test of up to 5 RF test structures in a single touchdown.
• Conformance to SEMI standards facilitates test automation
  SPECS-FA, the factory automation version of Agilent’s SPECS test shell, runs on all models of the 4080 Series tester family. SPECS-FA fully supports SEMI automation standards E5 (SECS II), E30 (GEM), E87 (CMS), E39 (OSS), E40 (PMS), E90 (STS), and E94 (CJM).
• Linux OS improves supportability and lowers costs
  The Agilent 4080 Series system software and Agilent SPECS and SPECS-FA test shells use the Linux operating system. This saves money through the use of cheaper and more maintainable Linux-based system hardware.