88000 HS-100 High Speed and Sensitivity Array Test System

Product Benefits

• Fast full array test technology within allotted TACT
• High testing sensitivity and exact defect detection
• Provides the data needed for efficient process feedback and product cost reduction
• Adapts to new FPD technology, including AM-OLED and SOG

General Features

• Test targets : TFT arrays of LTPS LCD, HTPS LCD, and AM-OLED panels
• Number of measurement pins : Up to 2,304 pins (2 test heads with multiplexer)
• Number of multiple test sites : Up to eight

Typical Evaluation Items

• Opens, Shorts, and Opens or Shorts between lines
• Cs and Charge in pixel
• Ion, Ioff, Vth, and OLED driver transistor
• Shift register carry-out in peripheral circuitry area

Measurement Capability

• Current measurement range: 20 uA, 2 uA, 200nA, 20 nA
• Current measurement resolution: 5 nA, 500 pA, 50 pA, 5 pA
• Charge measurement repeatability : ? = < 5 fC (equivalent to 1 fF) [supplemental characteristics]

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