Laser Interferometer Position Measurement Systems

Laser interferometer position measurement systems provide very precise position or distance information for dimensional measurements or motion control.

Agilent offers a variety of industry-leading solutions that are ideal for:

• Laser-based Dynamic Calibration Systems
• Mechanical parts inspection and measurement
• Mechanical vibration analysis
• Semiconductor fabrication, inspection and repair

When built into manufacturing and inspection equipment, a laser interferometer system reports the position or controls the motion of a product platform with more accuracy than any other method. It allows manufacturers to produce precision products from integrated circuits to medical devices to aerospace components that meet the most stringent specifications.

Additionally, precision laser position measurement systems allow users to improve product quality and reliability, increase manufacturing consistency and production yields. The result is lowered cost, high-quality output and reduced scrap and rework.

Standard systems include:

• Dynamic Calibrators for machine-tool validation
• Laser-based transducers

Agilent's laser interferometry products are available as standard systems or are fully configurable to meet individual application requirements. The modular laser, optics and electronics give customers the flexibility they need in a precision laser measurement system.

See the product categories in the section below. For information on how to configure a system and design considerations, see the Laser and Optics User's Manual, Chapter 3, System Design Considerations