Agilent 10766A Product Photograph

10766A Linear Interferometer

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The Agilent 10766A Linear Interferometer is used for general purpose single axis measurements and can be employed when the interferometer is the moving component, instead of the measurement reflector. It has a rugged, thermally stable stainless steel housing.

It is optically identical to the 10702A option 001. However, the 10766A has a more robust housing and metric threads.

The 10766A includes one 10767A Linear Reflector as a reference reflector. A 10703A is needed to complete the linear measurement optic set. The interferometer cannot be used to bend the beam. It can be the moving component without any modification.

Differential operation requires removing the 10767A Linear Reflector and attaching it to the reference surface of interest.

  • Brief description: Interferometer, linear, 1 axis, 6 mm beam
  • Measurements: Linear
  • Number of axis: 1
  • Beam size: 6 mm
  • Usage: General purpose
  • Application: Single axis
  • Stability: Medium
  • Optical resolution: Lambda/2 (316.5 nm, 12.5 uin)
  • System resolution (32x): Lambda/64 (10 nm, 0.4 uin) (When used with the Agilent 5527B Laser Positioning System, 10885A PC Axis Board or 10895A Laser Axis Board for VMEbus.)
  • System resolution (256x): Lambda/512 (1.2 nm, 0.047 uin) (When used with the Agilent 10897B, 10897C and 10898A Axis Boards for VMEbus.)
  • Beam separation: 11 mm (0.43 in)
  • Weight: 312 g (11 oz)
  • Type: Not plane mirror
  • Recommended reflector: 10767A
  • Mount used: 10785A
  • Beam bending possible: No
  • Interferometer movement allowed: Yes
  • Related products: 10702A option 001

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