10770A Angular Interferometer

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描述

The Agilent 10770A Angular Interferometer is a high accuracy plane mirror interferometer ideal for use in precision calibration applications. Used with the 10771A Angular Reflector in an 5529A Dynamic Calibrator system, the interferometer measures pitch and yaw motions along each axis that a machine tool or measuring machine travels. The system can help quickly locate and evaluate unwanted angular motion. The 10770A has a range of up to ±36,000 arc-seconds (±10°) when used with the 10771A Angular Reflector, with 0.1 arc-second resolution and a maximum transmitted beam deviation of ±30 arc-seconds. An alignment target is included to simplify setup.

As part of the 5529A system, the 10770A is a powerful diagnostic tool that helps find the causes of angular positioning errors – information that is critical in making replace or rebuild decisions for older machine tools.

Brief description: Interferometer, angular, 1 axis, 6 mm beam
Measurements: Rotation (pitch) about the Y axis OR rotation (yaw) about the Z axis
Number of axis: 1
Beam size: 6 mm
Usage: High accuracy
Application: Single axis
Stability: Medium
Measurement Resolution: 0.1 arc-second
Range: Up to ±36,000 arc-seconds (±10° when used with the Agilent 10771A Angular Reflector)
Maximum transmitted beam deviation: ±30 arc-seconds
Optical resolution: Lambda/4 (158.2 nm, 6.2 uin)
System resolution (32x): Lambda/64 (10 nm, 0.4 uin) (When used with the Agilent 5527B Laser Positioning System, 10885A PC Axis Board or 10895A Laser Axis Board for VMEbus.)
System resolution (256x): Lambda/512 (1.2 nm, 0.047 uin) (When used with the Agilent 10897B, 10897C and 10898A Axis Boards for VMEbus.)
Beam separation: 11 mm (0.43 in)
Weight: 553 g (19.5 oz)
Housing: Stainless steel (416)
Apertures: Plastic (Nylon)
Optics: Optical grade glass
Adhesives: Low volatility (vacuum grade)
Type: Not plane mirror
Recommended reflector: 10771A
Mount used: 10785A
Beam bending possible: No
Interferometer movement allowed: ?
Included accessory: Alignment target simplifies setup
Related products: 10771A, 10785A, 55281A