10721A Two Axis Differential Interferometer

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描述

The Agilent 10721A Two Axis Differential Interferometer, when used in multiple axis applications, simultaneously makes two differential measurements – linear and angular (yaw) displacement. Both measurements reference external mirror mounted to an object such as a column or inspection tool. The 10721A provides high immunity to unwanted interferometer displacement, such as thermal expansion. It is a modular, compact design with monolithic optics for maximized mechanical stability. Use of a small 3 mm beam helps decrease Abbé offset error. The 10721A is similar to the 10719A Single Axis Differential Interferometer, except that it provides an additional measurement axis.

The 10721A includes a shear plate to create parallel beam paths, two retroreflectors to manipulate the beam paths, and two quarter wave plates.

The user must supply both the reference and measurement mirrors.

See the 10719A for single axis differential measurements.

Brief description: Interferometer, plane mirror, linear, angular, differential, high stability, 2 axis, 3 mm beam
Measurements: Relative linear or absolute angular displacement (yaw)
Number of axis: 2
Beam size: 3 mm
Usage: 2 linear plane mirror measurements or 2 angular measurements
Application: Multiple axis, differential
Stability: High
Optical resolution: Lambda/4 (158.2 nm, 6.2 uin)
System resolution (32x): Lambda/128 (5 nm, 6.2 uin), 0.14 arcsec (0.7 urad) (When used with the Agilent 5527B Laser Positioning System, 10885A PC Axis Board or 10895A Laser Axis Board for VMEbus.)
System resolution (256x): Lambda/1024 (0.62 nm, 0.024 uin), 0.02 arcsec (0.1 urad) (When used with the Agilent 10897B, 10897C and 10898A Axis Boards for VMEbus.)
Beam separation: See specs
Weight: 300 g (11 oz)
Type: Plane mirror
Recommended reflector: Custom
Mount used: Custom
Beam bending possible: No
Interferometer movement allowed: Yes
Related products: 10719A