4073A Ultra Advanced Parametric Tester

Product Status: Currently Orderable | Currently Supported

click to collapse this panelKey Specifications

General Features

  • Supports up to 2xHPSMU, up to 2xHRSMU, and up to 8 total SMUs
  • Low-leakage switching matrix, customizable from 12 to 48 fully-guarded Kelvin outputs
  • High-frequency switching matrix with integrated pulse generator control
  • 8 auxiliary inputs and 48 extended path inputs for support of external instruments

Measurement Capabilities

  • 2 microvolt and 1 femtoamp measurement resolution (HRSMU)
  • +/- 200 Volts and +/- 1 Amp output capability (HPSMU)
  • 1 kHz to 1 MHz capacitance frequency measurement range (using 4284A or E4980A)
  • +/- 1.6 Amp ground unit (GNDU)

HV-SPGU Option Measurement Capabilities

  • +/-40 V output (80 V peak-to-peak) at high impedance
  • Pulse rise and fall times as fast as 20 ns
  • Three-level output pulse capability
  • Arbitrary Linear Waveform Generation (ALWG) function

click to collapse this panelDescription

The choice for advanced process and characterization needs. The Agilent 4073A ultra advanced parametric tester with Agilent SPECS is designed to perform highly precise DC measurement, capacitance measurement, flash memory cell testing, and testing of other high-frequency applications. The system supports up to eight source monitor units (SMUs), two of which may be high-resolution SMUs (HRSMUs), and two of which may be high-power SMUs (HPSMUs). Each SMU is self-calibrating and may be individually configured to force either current or voltage and simultaneously measure either voltage or current.

Total Solution for Parametric Test

An efficient and complete parametric test solution requires exceptional software in addition to superior hardware. To meet these requirements, the 4073A has a versatile system software environment that is compatible with several Parametric Test Software solutions, including Agilent's: SPECS(Semiconductor Process Evaluation Core Software) test shell , SPECS-FA, VPA/PME and PDQ-WLR. To learn more about this software, click Related Products.

Agilent N9201A is an optional test system for both 4070 and 4080 series and provides greater throughput improvement. Please visit N9201A product page.

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