ASUR Production Wafer-Level Reliability (ASUR PDQ-WLR®)

Total PDQ-WLR® Solution

The shortened production lifetimes of modern semiconductor processes have increased the importance of wafer-level reliability (WLR) data. Today wafer fabs must use WLR data from the production line to ensure the reliability of their devices. In addition, reduced reliability qualification cycle times are needed to speed new IC processes to market. Used properly, WLR can provide high quality reliability data in a few minutes that was previously obtained through weeks of reliability test done on package test structures. This significantly shortens the development cycle time and results in faster time to market with less cost.

Agilent’s ASUR PDQ (Predictive, Demonstrated, Quantitative) WLR software environment consists of Agilent ASUR PDQ-WLR test software, a WLR framework, Agilent SPECS (Semiconductor Process Evaluation Core Software) test shell and Agilent ASUR RDA (Analysis Tool) software. The user interface is GUI (graphical user interface) based. This makes it easy to use for WLR testing, analysis and quick decision-making. You can use it to detect problem production lots and to make process development decisions. For example, the software has prove effective in developing state-of-the-art Cu/low-k dielectric processes.

Accurate physics-based test algorithms and sophisticated characterization and analysis capabilities make PDQ-WLR uniquely suitable for all phases of IC evolution: production, development and qualification.

Agilent ASUR PDQ-WLR® for the Agilent SPECS Test Shell

Agilent ASUR PDQ-WLR® test software provides an easy-to-use test environment in conjuction with the WLR test framework in the Agilent SPECS test shell. You can perform basic WLR tests (standard EM, HCI and GOI) with minimal programming effort once your Agilent parametric test system, prober, and the Agilent SPECS test shell are customized to your test environment. Agilent SPECS also provides an easy-to-use yet sophisticated test development environment to meet the needs of advanced user, including production SPC (statistical process control) applications.

Agilent ASUR PDQ-WLR® test software contains more than 30 sophisticated WLR test algorithms, and tests for all of the major reliability failure mechanisms. This includes electromigration (including contacts, vias, and void detection), oxide breakdown, hot carrier degradation, plasma damage, mobile ions as well as characterization of interface states and trapped charge.

You can develop a customized test plan with a few mouse clicks by selecting the necessary test algorithms from the algorithm list that resides in the Agilent SPECS GUI-based test development window.

Agilent ASUR PDQ-WLR test software, when used in conjunction with ASUR PDQ-Fab™ WLR test structures, yields the most repeatable and predictive wafer level reliability data.

Agilent SPECS provides an integrated parametric test environment. This includes the control and interface of the wafer prober, probe card, Agilent parametric tester, WLR test sequence and GUI user interface.

You can use Agilent PDQ-WLR test software in the Agilent BASIC/UX environment.

Agilent ASUR PDQ-WLR test software has a well-documented, built-in relational database. This permits turnkey analysis by Agilent ASUR RDA for quick answers. If desired, the database can also be turned off or the data can be read into other databases.

Agilent PDQ-WLR Software Test Algorithm/Functionality List

• EM: Isothermal, SWEAT, BEM, TCR, TVP (thermal resistance), poly-heater
• GOI: V-ramp, J-ramp, V-TDDB, J-TDDB
• HCI: Constant V stress, details device characterization, lifetime extraction
• Charge Pumping: Interface traps/oxide trapped charge
• Capacitance-voltage: High-frequency CV
• Mobile ions: Self-heated BTI
• Database generation and management

Hardware Supported

• HP Visualize C3600 or HP 9000 series 700 model 745 or equivalent
• HP-UX 10.20 or later with HP BASIC/UX
• Agilent Parametric Test System: Agilent 4073A, 4072A or 4071A
• Agilent SPECS Test Shell: Version 2.4 or greater (BASIC), or Version 2.51 or greater (C)

^{PDQ-WLR® is a registered trademark of Core Wafer Systems
PDQ-FAB™ is a registered trademark of Core Wafer Systems}

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