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Laser Interferometers & Calibration Systems

Agilent Technologies is a world leader in the design and manufacture of laser interferometry systems, advanced electronic measurement systems, high-precision optical components, complex monolithic optics (CMOs), and opto-electronic systems design for the most demanding metrology applications. Agilent systems offer high precision in a wide dynamic range, the ability to simultaneously measure a position with multiple degrees of freedom, and the highest accuracy available in both air and vacuum systems.

With more than 11,000 systems delivered, our modular interferometry solutions set the standard for precision measurement of the most challenging applications in semiconductor lithography, aerospace/defense, metrology, and manufacturing. Moving forward, Agilent will continue to innovate systems that will enable the future in each of these markets.

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Laser Interferometer Electronics - Quick Fact Sheet
This two-page quick fact sheet highlights the key features and specifications for Agilent’s Laser Interferometer Electronics.

Promotional Materials 2012-07-24

PDF PDF 737 KB
5530 Laser Calibration System Data Sheet
System specifications for 5530 laser calibration system.

Data Sheet 2012-07-18

PDF PDF 1.06 MB
E1738A Air Temperature/Pressure/Humidity Sensor Data Sheet
This environmental sensor is used with the Agilent E1736A USB Sensor Hub as part of the 5530 Laser Calibration System.

Data Sheet 2012-07-18

PDF PDF 91 KB
5530 Laser Calibration System Brochure

Brochure 2012-07-18

PDF PDF 659 KB
5530 Laser Calibration System Components Selection Guide

Selection Guide 2012-07-11

PDF PDF 2.69 MB
55282A Flatness Accessory Kit
With 5530 and 55281A, the kit measures flatness in 3 dimensions of a surface plate and machine bed, or measures way straightness of solid objects, such as machine tool ways and master straight edges.

Data Sheet 2012-07-04

PDF PDF 111 KB
55290B Rotary Axis Measurement Kit

Data Sheet 2012-07-04

PDF PDF 189 KB
E1735A USB Axis Module Data Sheet
The Agilent E1735A USB Axis Module is the electronic interface for the 5519A/B laser head used in the Agilent 5530 Laser Calibration System.

Data Sheet 2012-07-04

PDF PDF 87 KB
E1737A Material Temperature Sensor Data Sheet
This material temperature sensor is used with the Agilent E1736A USB Sensor Hub as part of the 5530 Laser Calibration System.

Data Sheet 2012-07-04

PDF PDF 74 KB
E1736A USB Sensor Hub Data Sheet

Data Sheet 2012-07-04

PDF PDF 88 KB
55290A Angular Position Measurement Kit Data Sheet

Data Sheet 2012-07-04

PDF PDF 163 KB
55280B Linear Measurement Kit Data Sheet

Data Sheet 2012-07-04

PDF PDF 115 KB
55281A Angular Optics Kit

Data Sheet 2012-07-04

PDF PDF 110 KB
10768A Diagonal Measurement Kit Data Sheet

Data Sheet 2012-07-04

PDF PDF 90 KB
Are you getting the most from your machine tool operations?

Brochure 2012-06-18

PDF PDF 172 KB
E1827A 2-Axis Interferometer, Yaw - Quick Fact Sheet
The E1827A features pre-aligned optical sensors, excellent beam parallelism, low non-linearity error and low thermal drift. Machined datums aid in positioning the unit and reduce alignment effort.

Promotional Materials 2012-05-08

PDF PDF 411 KB
10898D High Resolution Dual Laser Axis Board
The Agilent 10898D dual axis board combines the same excellent resolution of the 10897D board together with increased slew rates and even better noise performance.

Data Sheet 2012-05-08

PDF PDF 246 KB
10897D High Resolution VME Laser Axis Board
The Agilent 10897D High Resolution VME Laser Axis Board offers outstanding position resolution and low noise, resulting in unsurpassed positioning repeatability and accuracy compared to previous laser systems.

Data Sheet 2012-05-08

PDF PDF 258 KB
Laser Interferometer Systems - Quick Fact Sheet
The QFS provides the list of components in 6 areas to configure a system to enable precision measurement of position changes. A complete system is comprised of one or more components from each area.

Promotional Materials 2012-05-08

PDF PDF 417 KB
Laser Interferometer Systems Compensation Number Calculations - Quick Fact Sheet
This QFS provides various ways of calculating the compensation number for Agilent laser interferometer systems when operating in an air environment.

Promotional Materials 2012-04-20

PDF PDF 495 KB
Laser Interferometer Systems Position Calculations - Quick Fact Sheet
This QFS provides equations calculating positions from raw interferometer data for Agilent laser interferometer systems.

Promotional Materials 2012-04-20

PDF PDF 500 KB
5517A/B/C/CL/D/DL/EL/FL/GL Laser Heads for Transducer Systems - Quick Fact Sheet
5517x are He-Ne lasers sources that provide highly stable and accurate 633 nm wavelength. A variety of Zeeman split frequencies, beam size and power levels are available. MTBF>50,000 hours typical.

Promotional Materials 2012-04-06

PDF PDF 460 KB
Laser Interferometer Beam Directing Optics - Quick Fact Sheet

Promotional Materials 2012-03-16

PDF PDF 445 KB
Laser Interferometer Measurement Optics - Quick Fact Sheet
Agilent offers a wide selection of measurement optics for use with Agilent Laser Interferometer systems.

Promotional Materials 2012-03-14

PDF PDF 424 KB
Agilent Transducer Systems - Leading the Future for Extreme Accuracy Positioning Applications

Brochure 2012-01-19

PDF PDF 465 KB

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