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Laser Interferometers & Calibration Systems

Agilent Technologies is a world leader in the design and manufacture of laser interferometry systems, advanced electronic measurement systems, high-precision optical components, complex monolithic optics (CMOs), and opto-electronic systems design for the most demanding metrology applications. Agilent systems offer high precision in a wide dynamic range, the ability to simultaneously measure a position with multiple degrees of freedom, and the highest accuracy available in both air and vacuum systems.

With more than 11,000 systems delivered, our modular interferometry solutions set the standard for precision measurement of the most challenging applications in semiconductor lithography, aerospace/defense, metrology, and manufacturing. Moving forward, Agilent will continue to innovate systems that will enable the future in each of these markets.

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Laser Interferometer Electronics - Quick Fact Sheet
This two-page quick fact sheet highlights the key features and specifications for Agilent’s Laser Interferometer Electronics.

Promotional Materials 2012-07-24

PDF PDF 737 KB
5530 Laser Calibration System Brochure

Brochure 2012-07-18

PDF PDF 659 KB
Are you getting the most from your machine tool operations?

Brochure 2012-06-18

PDF PDF 172 KB
E1827A 2-Axis Interferometer, Yaw - Quick Fact Sheet
The E1827A features pre-aligned optical sensors, excellent beam parallelism, low non-linearity error and low thermal drift. Machined datums aid in positioning the unit and reduce alignment effort.

Promotional Materials 2012-05-08

PDF PDF 411 KB
Laser Interferometer Systems - Quick Fact Sheet
The QFS provides the list of components in 6 areas to configure a system to enable precision measurement of position changes. A complete system is comprised of one or more components from each area.

Promotional Materials 2012-05-08

PDF PDF 417 KB
Laser Interferometer Systems Position Calculations - Quick Fact Sheet
This QFS provides equations calculating positions from raw interferometer data for Agilent laser interferometer systems.

Promotional Materials 2012-04-20

PDF PDF 500 KB
Laser Interferometer Systems Compensation Number Calculations - Quick Fact Sheet
This QFS provides various ways of calculating the compensation number for Agilent laser interferometer systems when operating in an air environment.

Promotional Materials 2012-04-20

PDF PDF 495 KB
5517A/B/C/CL/D/DL/EL/FL/GL Laser Heads for Transducer Systems - Quick Fact Sheet
5517x are He-Ne lasers sources that provide highly stable and accurate 633 nm wavelength. A variety of Zeeman split frequencies, beam size and power levels are available. MTBF>50,000 hours typical.

Promotional Materials 2012-04-06

PDF PDF 460 KB
Laser Interferometer Beam Directing Optics - Quick Fact Sheet

Promotional Materials 2012-03-16

PDF PDF 445 KB
Laser Interferometer Measurement Optics - Quick Fact Sheet
Agilent offers a wide selection of measurement optics for use with Agilent Laser Interferometer systems.

Promotional Materials 2012-03-14

PDF PDF 424 KB
Agilent Transducer Systems - Leading the Future for Extreme Accuracy Positioning Applications

Brochure 2012-01-19

PDF PDF 465 KB
Laser Interferometer System Cables - Quick Fact Sheet
This two-page quick fact sheet highlights the key features and specifications for Agilent’s Laser Interferometer System Cables.

Promotional Materials 2011-05-12

PDF PDF 552 KB
E1834E/G/J/M/Z Mounted Beam Delivery Optics - Quick Fact Sheet
Agilent E1834x is a series of beam delivery optics in high performance mounts that offer high pointing stability. They are available in a variety of splitting percentages and mounting configurations.

Promotional Materials 2011-03-22

PDF PDF 491 KB
Z4422B Three-Axis Plane Mirror Interferometer - Quick Fact Sheet
The Z4422B features pre-aligned optical sensors, excellent beam parallelism, low non-linearity error and low thermal drift. Machined datums aid in positioning the unit and reduce alignment effort.

Promotional Materials 2011-03-22

PDF PDF 452 KB
Z4421B Five-Axis Plane Mirror Interferometer - Quick Fact Sheet
The Z4421B features pre-aligned optical sensors, excellent beam parallelism, low non-linearity error and low thermal drift. Machined datums aid in positioning the unit and reduce alignment effort.

Promotional Materials 2011-03-22

PDF PDF 640 KB
Z4420B Five-Axis Plane Mirror Interferometer - Quick Fact Sheet
The Z4420B features pre-aligned optical sensors, excellent beam parallelism, low non-linearity error and low thermal drift. Machined datums aid in positioning the unit and reduce alignment effort.

Promotional Materials 2011-03-22

PDF PDF 585 KB
Z4399A Three-Axis Plane Mirror Interferometer - Quick Fact Sheet
The Z4399A features pre-aligned optical sensors, excellent beam parallelism, low non-linearity error and low thermal drift. Machined datums aid in positioning the unit and reduce alignment effort.

Promotional Materials 2011-03-22

PDF PDF 595 KB
N1226A, N1227A, N1228A/B VME Control and Interface System - Quick Fact Sheet
The system connects Agilent VME laser system to a Delta Tau servo system. It reads raw position from the boards, compensates data before sending results to the servo system every servo sample period.

Promotional Materials 2011-03-17

PDF PDF 277 KB
N1225A VME Four-Channel High Resolution Laser Axis Board - Quick Fact Sheet
The N1225A provides ultra-sensitive fiber optic receivers and high resolution distance measurements. Multiple N1225A boards can be linked together for up to 31 axes of position measurement.

Promotional Materials 2011-03-16

PDF PDF 254 KB
N1231A, N1231B PCI Three-Axis Laser Axis Boards - Quick Fact Sheet
The N1231A/B board each contain three measurement axes. The API software provides access to the high resolution position data on the board. Easy connection to off-the-shelf data acquisition systems.

Promotional Materials 2011-03-16

PDF PDF 985 KB
E1826E, E1826F, E1826G One-Axis Plane Mirror Interferometers - Quick Fact Sheet
E1826E (right turn beam path), E1826F (left turn beam path) and E1826G (straight through beam path) features pre-aligned optical sensors, ±1 nm maximum non-linearity error and low thermal drift.

Promotional Materials 2011-03-15

PDF PDF 244 KB
Verify Machine Performance with the World Standard for Laser-based Metrology
Agilent 5529A Dynamic Calibrator

Brochure 2005-11-15

PDF PDF 4.87 MB