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Laser Interferometers & Calibration Systems

Agilent Technologies is a world leader in the design and manufacture of laser interferometry systems, advanced electronic measurement systems, high-precision optical components, complex monolithic optics (CMOs), and opto-electronic systems design for the most demanding metrology applications. Agilent systems offer high precision in a wide dynamic range, the ability to simultaneously measure a position with multiple degrees of freedom, and the highest accuracy available in both air and vacuum systems.

With more than 11,000 systems delivered, our modular interferometry solutions set the standard for precision measurement of the most challenging applications in semiconductor lithography, aerospace/defense, metrology, and manufacturing. Moving forward, Agilent will continue to innovate systems that will enable the future in each of these markets.

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Laser and Optics User's Manual, Chapter 5, Laser heads
Part of the Laser and Optics User's Manual available in print form as p/n 05517-90045 and CD form as 05517-90063.

User Manual 2002-07-01

PDF PDF 763 KB
Laser and Optics User's Manual, Chapter 3, System design considerations
Part of the Laser and Optics User's Manual available in print form as p/n 05517-90045 and CD form as 05517-90063.

User Manual 2002-07-01

PDF PDF 796 KB
Laser and Optics User's Manual, Chapter 4, System installation and alignment
Part of the Laser and Optics User's Manual available in print form as p/n 05517-90045 and CD form as 05517-90063.

User Manual 2002-07-01

PDF PDF 782 KB
Declaration of Conformity - 5087A

User Manual 1998-12-01

PDF PDF 52 KB
E1750A Broadband Distribution Amplifier User's Guide
Part number: E1750-90001 (July 1993). The E1750A is a discontinued product. This manual is provided for information only.

User Manual 1993-07-01

PDF PDF 311 KB
5528A Laser Measurement System User's Guide
Part Number: 05528-90022 (Mar92). This user's guide is provided for information only. The 5528A is no longer sold by Agilent.

User Manual 1992-03-01

PDF PDF 16.75 MB
35665A Dynamic Signal Analyzer Concepts Guide
Part Number: 35665-90028 (Sep91). The 35665A is a discontinued product; this manual is provided for information only.

User Manual 1991-09-01

PDF PDF 8.93 MB
5501A Laser Transducer System Operating and Service Manual
05501-90026 (May 1987) The 5501A Laser Transducer System is a discontinued product. This manual is provided for information only.

User Manual 1987-05-01

PDF PDF 7.21 MB
5501B Laser Head Operating and Service Manual
05501-90035 (September 1986) The 5501B Laser Head is a discontinued product. This manual is provided for information only.

User Manual 1986-09-01

PDF PDF 4.73 MB
5501A Laser Transducer Operating and Service Manual
05501-90028 (May 1983) The 5501A Laser Transducer is a discontinued product. This manual is provided for information only.

User Manual 1983-05-01

PDF PDF 5.36 MB
5501A Laser Transducer Operating and Service Manual
05501-90025 (May 1981) The 5501A Laser Transducer is a discontinued product. This manual is provided for information only.

User Manual 1981-05-01

PDF PDF 2.98 MB
5526A Laser Measurement Systems User’s Guide
05526-90066 (October 1980) The 5526A Laser Measurement Systems is a discontinued product. This manual is provided for information only.

User Manual 1980-10-01

PDF PDF 8.51 MB
5526A Laser Measurement/Calculator Systems Operating Manual
05526-90030 (September 1975) The 5526A Laser Measurement/Calculator Systems is a discontinued product. This manual is provided for information only.

User Manual 1975-09-01

PDF PDF 2.29 MB
5526A Laser Measurement/Calculator Systems Operating Manual
05526-90027 (February 1974) The 5526A Laser Measurement/Calculator Systems is a discontinued product. This manual is provided for information only.

User Manual 1974-02-01

PDF PDF 3.41 MB